By Shyam P Muraka
Semiconductor applied sciences are relocating at this sort of quick speed that new fabrics are wanted in every kind of program. Manipulating the fabrics and their houses at atomic dimensions has develop into a needs to. This ebook provides the case of interlayer dielectrics fabrics when contemplating those demanding situations. Interlayer Dielectrics for Semiconductor applied sciences conceal the technology, houses and purposes of dielectrics, their guidance, patterning, reliability and characterisation, through the dialogue of other fabrics together with people with excessive dielctric constants and people valuable for waveguide functions in optical communications at the chip and the package deal. * Brings jointly for the 1st time the technology and know-how of interlayer deilectrics fabrics, in a single quantity* written by means of popular specialists within the box* offers an up to date place to begin during this younger study box.
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Extra resources for Interlayer Dielectrics for Semiconductor Technologies, Volume 1 (Academic Press)
Characteristics of three classes of materials are summarized: polymers, silsesquioxianes and porous dielectrics, focusing on the correlation of molecular structure and material properties. Results from porous organosilicate films revealed that while dielectric constant and thermal conductivity scale with the average density of the material, the thermomechanical properties degrade significantly beyond the percolation point when pores become interconnected. This points out the challenge for development of porous low- dielectrics.
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